Ethanol sensors with high selectivity and sensitivity have tremendous application potential as a device in traffic management, food ferment, wine making and medical processes. Currently a large variety of metal oxide semiconductors have been tested as gas sensing materials both for ceramic and thin film gas sensors. Most of the studied gas sensors operate at nearly 200-600°C. In this paper, we report synthesis of highly resistive Bismuth ferrite (BiFeO3 abbreviated as BFO) thin films. The BFO thin films were grown on different substrates including Si, SiO2, platinized silicon and quartz by using pulsed laser deposition technique. The films were deposited at different deposition conditions to obtain different grain size. The films were characterized by various techniques like XRD, AFM. The room temperature resistivity measurement on exposer of ethanol is to be carried out in order to determine ethanol sensing ability.